Electromagnetic modeling of interference, confocal, and focus variation microscopy
Pahl Tobias, Rosenthal Felix, Breidenbach Johannes, Danzglock Corvin, Hagemeier Sebastian, Xu Xin, Künne Marco, Lehmann Peterelectromagnetic modeling, coherence scanning interferometry, confocal microscopy, focus variation microscopy, surface topography
| Document type | Article |
| Journal title / Source | Advanced Photonics Nexus |
| Volume | 3 |
| Issue | 01 |
| Publisher's name | SPIE-Intl Soc Optical Eng |
| Publisher's address (city only) | Bellingham, WA, United States |
| Publication date | 2024-2 |
| ISSN | 2791-1519 |
| DOI | 10.1117/1.APN.3.1.016013 |
| Language | English |