Impact study of numerical discretization accuracy on parameter reconstructions and model parameter distributions
Plock M., Hammerschmidt M., Burger S., Schneider P.I., Schütte C.optical metrology, parameter reconstruction, numerical methods, Bayesian optimization, Bayesian target vector optimization, finite element methods, parameter uncertainties, Markov chain Monte Carlo sampling
| Document type | Article |
| Journal title / Source | Metrologia |
| Volume | 60 |
| Page numbers / Article number | 054001 |
| Publication date | 2023 |
| DOI | 10.1088/1681-7575/ace4cd |
| Web URL | https://arxiv.org/abs/2305.02663 |
| Language | English |