Publications
Please find below selected publications from EURAMET's European Metrology Research Programmes (EMRP and EMPIR) and the Metrology Partnership that are related to Clean Energy:
Dual beam organic depth profiling using large argon cluster ion beams
Surface and Interface Analysis 46 (2014)
- Type:
- Proceedings
- Project title:
- IND15: SurfChem: Traceable quantitative surface chemical analysis for industrial applications
- Name of Call / Funding Programme:
- EMRP A169: Call 2010 Industry
- DOI
- 10.1002/sia.5429
Gonio-espectrofotómetro para medidas de BRDF de patrones de reflectancia y objetos gonio-aparentes
(2014)
- Type:
- Thesis
- Project title:
- IND52: XD Reflect: Multidimensional reflectometry for industry
- Name of Call / Funding Programme:
- EMRP A169: Call 2012 Metrology for Industry (II)
Performance metrics for testing statistical calculations in interlaboratory comparisons
Advances in Production Engineering & Management 9 (2014) , 44-52
- Type:
- Article
- Project title:
- NEW06: TraCIM: Traceability for computationally-intensive metrology
- Name of Call / Funding Programme:
- EMRP A169: Call 2011 Metrology for New Technologies
- DOI
- 10.14743/apem2014.1.175
Calorimetric determination of the absorbed dose to water for medium-energy X-rays with generating voltages from 70kV to 280 kV
Physics in Medicine and Biology: 57 (2012),19, 6245-6268 57 (2014) , 6245-6268
- Type:
- Article
- Project title:
- HLT09: MetrExtRT: Metrology for radiotherapy using complex radiation fields
- Name of Call / Funding Programme:
- EMRP A169: Call 2011 Metrology for Health
- DOI
- 10.1088/0031-9155/57/19/6245
A surrogate model enables a Bayesian approach to the inverse problem of scatterometry
Journal of Physics: Conference Series 490 (2014) , 012007
- Type:
- Article
- Project title:
- NEW04: Uncertainty: Novel mathematical and statistical approaches to uncertainty evaluation
- Name of Call / Funding Programme:
- EMRP A169: Call 2011 Metrology for New Technologies
- DOI
- 10.1088/1742-6596/490/1/012007
Improved reconstruction of critical dimensions in exteme ultraviolet scatterometry by modellig systematic errors
Measurement Science and Technology 25 (2014) , 044003 (9pp)
- Type:
- Article
- Project title:
- NEW04: Uncertainty: Novel mathematical and statistical approaches to uncertainty evaluation
- Name of Call / Funding Programme:
- EMRP A169: Call 2011 Metrology for New Technologies
- DOI
- 10.1088/0957-0233/25/4/044003
Setup of a high-precision profilometer and comparison of tactile and optical measurements of standards
Measurement Science and Technology 25 (2014)
- Type:
- Article
- Project title:
- IND10: Form metrology: Optical and tactile metrology for absolute form characterization
- Name of Call / Funding Programme:
- EMRP A169: Call 2010 Industry
- DOI
- 10.1088/0957-0233/25/4/044011
Investigations of the influence of common approximations in scatterometry for dimensional nanometrology
Measurement Science and Technology 25 (2014)
- Type:
- Article
- Project title:
- IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
- Name of Call / Funding Programme:
- EMRP A169: Call 2010 Industry
- DOI
- 10.1088/0957-0233/25/4/044004
Measurements of CD and sidewall profile of EUV photomask structures using CD-AFM and Tilting-AFM
Meas. Sci. Technol. 25 (2014)
- Type:
- Article
- Project title:
- IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
- Name of Call / Funding Programme:
- EMRP A169: Call 2010 Industry
- DOI
- 10.1088/0957-0233/25/4/044002
In-situ nondestructive characterization of the normal spring constant of AFM cantilevers
Measurement Science and Technology 25 (2014)
- Type:
- Article
- Project title:
- NEW05: MechProNO: Traceable measurement of mechanical properties of nano-objects
- Name of Call / Funding Programme:
- EMRP A169: Call 2011 Metrology for New Technologies
- DOI
- 10.1088/0957-0233/25/4/044014