Publications

Improving the traceability chain in geodetic length measurement by the new robust interferometer TeleYAG

Bošnjakovic A., Pollinger F., Meiners–Hagen K.

2015

Proceedings 19th International Research/Expert Conference "Trends in the Development of Machinery and Associated Technology" 19 (2015) , 117-120

Type:: Proceedings
Project title:: SIB60: Surveying: Metrology for long distance surveying
Name of Call / Funding Programme:: EMRP A169: Call 2012 SI Broader scope (II)

Fast Simulation Method for Parameter Reconstruction in Optical Metrology

Burger S., Zschiedrich L., Pomplun J., Schmidt F., Bodermann B.

2015

Proc SPIE 8681 (2015)

Type:: Proceedings
Project title:: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:: EMRP A169: Call 2010 Industry
DOI: 10.1117/12.2011154

Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle

Soltwisch V., Burger S., Scholze F.

2015

Proc SPIE 8789 (2015)

Type:: Proceedings
Project title:: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:: EMRP A169: Call 2010 Industry
DOI: 10.1117/12.2020487

18F primary standard at ENEA-INMRI by three absolute techniques and calibration of a well-type IG11 ionization chamber

CAPOGNI M.C., CARCONI P.C., De FELICE P.DF., FAZIO A.F.

2015

Applied Radiation and Isotopes 109 (2015) , 410-413

Type:: Article
Project title:: HLT11: MetroMRT: Metrology for molecular radiotherapy
Name of Call / Funding Programme:: EMRP A169: Call 2011 Metrology for Health
DOI: 10.1016/j.apradiso.2015.12.055

The effect of line roughness on DUV scatterometry.

Henn M.-A., Heidenreich S., Groß H., Bodermann B., Baer M.

2015

Proc SPIE 8789 (2015)

Type:: Proceedings
Project title:: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:: EMRP A169: Call 2010 Industry
DOI: 10.1117/12.2020761

Nanometrology on Gratings with GISAXS: FEM Reconstruction and Fourier Analysis

Soltwisch V., Wernecke J., Haase A., Probst J., Schoengen M., Krumrey M., Scholze F.

2015

Proc SPIE (2015)

Type:: Proceedings
Project title:: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:: EMRP A169: Call 2010 Industry
DOI: 10.1117/12.2046212

Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry

Endres J., Kumar N., Petrik P., Henn M.-A., Heidenreich S., Pereira S. F., Urbach H. P., Bodermann B.

2015

Proc SPIE 9132 (2015)

Type:: Proceedings
Project title:: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:: EMRP A169: Call 2010 Industry
DOI: 10.1117/12.2052819

From Real-Time SAR Assessment to Temperature Distributions in Coronary Stents at 7T

Winter Lukas, Oberacker Eva, Özerdem Celal, Ji Yiyi, von Knobelsdorff-Brenkenhoff Florian, Weidemann Gerd, Ittermann Bernd, Seifert Frank, Niendorf Thoralf

2015

Proc. Intl. Soc. Mag. Reson. Med. 23 (2015)

Type:: Proceedings
Project title:: HLT06: MRI safety: Metrology for next-generation safety standards and equipment in MRI
Name of Call / Funding Programme:: EMRP A169: Call 2011 Metrology for Health

Fibre optics wavemeters calibration using a self-referenced optical frequency comb

Galindo-Santos J., Velasco A. V., Corredera P.

2015

Review of Scientific Instruments 86 (2015)

Type:: Article
Project title:: IND14: Frequency: New generation of frequency standards for industry
Name of Call / Funding Programme:: EMRP A169: Call 2010 Industry
DOI: 10.1063/1.4904973

Development of a scatterometry reference standard

Bodermann B., Loechel B., Scholze F., Dai G., Wernecke J., Endres J., Probst J., Schoengen M., Krumrey M., Hansen P.-E., Soltwisch V.

2015

Proc SPIE 9132 (2015)

Type:: Proceedings
Project title:: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:: EMRP A169: Call 2010 Industry
DOI: 10.1117/12.2052278