EMPIR project Metrology for manufacturing 3D stacked integrated circuits (IND07 3D Stack) will develop traceable measurement capabilities for detecting structural and chemical defects in high aspect ratio TSVs, and new methods to accurately characterise thermal and electrical properties at the nanoscale.
Results from the project will be presented at the conference. The conference will focus on the most recent scientific and technological developments in the field of environmental analysis, environment and its protection. With the support by the EcoBalt conference series, EcoBalt 2016 will be organised by the University of Tartu with Tallinn University of Technology and Estonian Environmental Research Centre.