The gateway to Europe's
integrated metrology community.

Welcome to the EURAMET Repository Link

The EURAMET Repository Link is an online service providing links to scientific papers and datasets published within the European Partnership on Metrology (Partnership), the European Metrology Programme for Innovation and Research (EMPIR), the European Metrology Research Programme (EMRP), and projects funded by iMERA-Plus.

References
Dual beam organic depth profiling using large argon cluster ion beams
Holzweber M., Shard A. G., Jungnickel H., Luch A., Unger W. E.S.
2014

Surface and Interface Analysis 46 (2014)

Type: Proceedings
Project title: IND15: SurfChem: Traceable quantitative surface chemical analysis for industrial applications
Name of Call / Funding Programme: EMRP A169: Call 2010 Industry
Gonio-espectrofotómetro para medidas de BRDF de patrones de reflectancia y objetos gonio-aparentes
Ana Maria Rabal
2014

(2014)

Type: Thesis
Project title: IND52: xDReflect: Multidimensional reflectometry for industry
Name of Call / Funding Programme: EMRP A169: Call 2012 Metrology for Industry (II)
Performance metrics for testing statistical calculations in interlaboratory comparisons
Acko BA, Sluban BS, Tasic TT, Brezovnik SB
2014

Advances in Production Engineering & Management 9 (2014) , 44-52

Type: Article
Project title: NEW06: TraCIM: Traceability for computationally-intensive metrology
Name of Call / Funding Programme: EMRP A169: Call 2011 Metrology for New Technologies
Calorimetric determination of the absorbed dose to water for medium-energy X-rays with generating voltages from 70kV to 280 kV
Krauss Achim, Büermann Ludwig, Kramer Hans-Michael, Hans-Joachim, Dosimetry for radiation therapy and diagnostic radiology, PTB,Braunschweig
2014

Physics in Medicine and Biology: 57 (2012),19, 6245-6268 57 (2014) , 6245-6268

Type: Article
Project title: HLT09: MetrExtRT: Metrology for radiotherapy using complex radiation fields
Name of Call / Funding Programme: EMRP A169: Call 2011 Metrology for Health
A surrogate model enables a Bayesian approach to the inverse problem of scatterometry
Heidenreich S, Gross H, Henn M-A, Elster C, Bär M
2014

Journal of Physics: Conference Series 490 (2014) , 012007

Type: Article
Project title: NEW04: Uncertainty: Novel mathematical and statistical approaches to uncertainty evaluation
Name of Call / Funding Programme: EMRP A169: Call 2011 Metrology for New Technologies
Improved reconstruction of critical dimensions in exteme ultraviolet scatterometry by modellig systematic errors
Henn M-A, Gross H, Heidenreich S, Scholze F, Elster C, Bär M
2014

Measurement Science and Technology 25 (2014) , 044003 (9pp)

Type: Article
Project title: NEW04: Uncertainty: Novel mathematical and statistical approaches to uncertainty evaluation
Name of Call / Funding Programme: EMRP A169: Call 2011 Metrology for New Technologies
Setup of a high-precision profilometer and comparison of tactile and optical measurements of standards
Nouira H, Salgado J-A, El-Hayek N, Ducourtieux S, Delvallée A, Anwer N
2014

Measurement Science and Technology 25 (2014)

Type: Article
Project title: IND10: Form: Optical and tactile metrology for absolute form characterisation
Name of Call / Funding Programme: EMRP A169: Call 2010 Industry
Investigations of the influence of common approximations in scatterometry for dimensional nanometrology
Endres J., Diener A., Wurm M., Bodermann B.
2014

Measurement Science and Technology 25 (2014)

Type: Article
Project title: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme: EMRP A169: Call 2010 Industry
Measurements of CD and sidewall profile of EUV photomask structures using CD-AFM and Tilting-AFM
Gaoliang D., Hahm K., Scholze F., Henn M.-A., Gross H., Fluegge J., Bosse H.
2014

Meas. Sci. Technol. 25 (2014)

Type: Article
Project title: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme: EMRP A169: Call 2010 Industry
In-situ nondestructive characterization of the normal spring constant of AFM cantilevers
Gao Sai, Brand Uwe
2014

Measurement Science and Technology 25 (2014)

Type: Article
Project title: NEW05: MechProNO: Traceable measurement of mechanical properties of nano-objects
Name of Call / Funding Programme: EMRP A169: Call 2011 Metrology for New Technologies
5740 RESULT(S)