Determination of line profiles on photomasks using DUV, EUV and X-ray scattering
Scholze F.,
Bodermann B.,
Burger S.,
Endres J.,
Haase A.,
Krumrey M.,
Laubis C.,
Soltwisch V.,
Ullrich A.,
Wernecke J.
2015
Proc SPIE
9231
(2015)
Type:
Proceedings
Project title:
IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:
EMRP A169: Call 2010 Industry
Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry
Petrik P.,
Kumar N.,
Fried M.,
Fodor B.,
Juhasz G.,
Pereira S.E.,
Burger S.,
Urbach H. P.
2015
JEOS
10
(2015)
Type:
Article
Project title:
IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:
EMRP A169: Call 2010 Industry
Chapter 6 “ Metrology for Vector Network Analyzers (VNA)"
Clarke R. G.,
Ridler N. M.
2015
N/A
(2015)
, 185-250
Type:
Contribution to book
Project title:
SIB62: HFCircuits: Metrology for new electrical measurement quantities in high-frequency circuits
Name of Call / Funding Programme:
EMRP A169: Call 2012 SI Broader scope (II)
A system for in situ S-parameter measurements of MR transmit arrays
Weidemann Gerd,
Seifert Frank,
Hoffmann Werner,
Seemann Rainer,
Waxmann Patrick,
Ittermann Bernd
2015
Proc. Intl. Soc. Mag. Reson. Med.
23
(2015)
Type:
Proceedings
Project title:
HLT06: MRI safety: Metrology for next-generation safety standards and equipment in MRI
Name of Call / Funding Programme:
EMRP A169: Call 2011 Metrology for Health
20 kV AC Divider with Ratio Correction
Hlavacek J.,
Draxler K.,
Styblikova R.
2015
ISH COLLECTION at eCIGRE, ref. ISH2015_520,
The 19th International Symposium on High Voltage Engineering
(2015)
, ISH2015_520
Type:
Proceedings
Project title:
ENG61: FutureGrid: Non-conventional voltage and current sensors for future power grids
Name of Call / Funding Programme:
EMRP A169: Call 2013 Energy II
