Fast Simulation Method for Parameter Reconstruction in Optical Metrology
Burger S.,
Zschiedrich L.,
Pomplun J.,
Schmidt F.,
Bodermann B.
2015
Proc SPIE
8681
(2015)
Type:
Proceedings
Project title:
IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:
EMRP A169: Call 2010 Industry
The effect of line roughness on DUV scatterometry.
Henn M.-A.,
Heidenreich S.,
Groß H.,
Bodermann B.,
Baer M.
2015
Proc SPIE
8789
(2015)
Type:
Proceedings
Project title:
IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:
EMRP A169: Call 2010 Industry
Nanometrology on Gratings with GISAXS: FEM Reconstruction and Fourier Analysis
Soltwisch V.,
Wernecke J.,
Haase A.,
Probst J.,
Schoengen M.,
Krumrey M.,
Scholze F.
2015
Proc SPIE
(2015)
Type:
Proceedings
Project title:
IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:
EMRP A169: Call 2010 Industry
From Real-Time SAR Assessment to Temperature Distributions in Coronary Stents at 7T
Winter Lukas,
Oberacker Eva,
Özerdem Celal,
Ji Yiyi,
von Knobelsdorff-Brenkenhoff Florian,
Weidemann Gerd,
Ittermann Bernd,
Seifert Frank,
Niendorf Thoralf
2015
Proc. Intl. Soc. Mag. Reson. Med.
23
(2015)
Type:
Proceedings
Project title:
HLT06: MRI safety: Metrology for next-generation safety standards and equipment in MRI
Name of Call / Funding Programme:
EMRP A169: Call 2011 Metrology for Health
Development of a scatterometry reference standard
Bodermann B.,
Loechel B.,
Scholze F.,
Dai G.,
Wernecke J.,
Endres J.,
Probst J.,
Schoengen M.,
Krumrey M.,
Hansen P.-E.,
Soltwisch V.
2015
Proc SPIE
9132
(2015)
Type:
Proceedings
Project title:
IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:
EMRP A169: Call 2010 Industry